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MEASUREMENT AND CONTROL
Vacuum gauges


Active linear convection gauge

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APGX-H ACTIVE LINEAR CONVECTION
GAUGE 1000 TO 2 x 10-4 Torr


The new BOC Edwards Linear Convection Gauge has a wide measuring range from 1333 to 3 x 10-4 mbar (1000 to 2.3 x 10-4 Torr). The use of convection technology ensures, accuracy and sensitivity are maintained to the top of the range. The gauge is compact and may be mounted in any orientation, simplifying installation where space is limited. The gauge incorporates a setpoint and two LED's, which indicate setpoint and gauge status. For reduced cost of ownership, the gauge is provided with a replaceable tube, in which calibration data is stored.

Features & benefits
• Wide measuring range
- 1333 to 3 x 10-4 mbar (1000 to 2.3 x 10-4 Torr). Wider than many competitor products
• Use of convection technology
- Ensures consistent measuring accuracy (typically ±10%) and repeatability (±5%) to top of range



• Replaceable tube
- Reduces cost of ownership and eliminates un-necessary environmental contamination
• Standard analog output
- Log linear in range 2.5 to 9.125 V (1 V/decade)
- Compatible with BOC Edwards AGC, AGD and TIC controllers
• Calibration data held in tube
- Tubes are shipped pre-calibrated, so the user does not need a vacuum system capable of pumping down to 10-5 mbar
• Can be mounted in any orientation
- Unlike many convection type gauges, the APGX-H maintains accuracy in any orientation across the whole measuring range, making for easier installation in restricted spaces
• Compact instrument
- The APGX-H is the smallest high pressure gauge offered by BOC Edwards and is significantly smaller than leading competitor products
• Local status indication
- LED's indicate setpoint and gauge status at the gauge head
Active linear pirani gauge

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APGX ACTIVE LINEAR PIRANI GAUGE
ATMOSPHERE TO 10-4 mbar


The new Active Linear Pirani Gauge is based on proven BOC Edwards Pirani technology. This new gauge has however been engineered to provide a 1 volt per decade log/linear output, together with very simple push button controls, a second set point and error diagnostics. The gauge is particularly suitable for direct integration into OEM systems, requiring no look-up tables, merely the inclusion of a simple formula for interpretation of the gauge output.

Features & benefits
• Integral electronics with 1 volt per decade linear output allows standalone operation and makes for easy integration into OEM control systems, with up to 100 m cable runs



• New diagnostics facility enables gauge to report broken filament, out of range and calibration errors
• Two, easy to use, push-button adjustable set points, for process control and/or diagnostics reporting
• Single pushbutton switch sets both atmosphere and vacuum
• Innovative electronics design enables compliance with low emission and high immunity EMC standards
• Medium and low pressure versions available
• Corrosion resistant versions available
• Choice of stainless steel or aluminum gauge tubes with a selection of vacuum fittings and filament materials to suit your application


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APG ACTIVE PIRANI GAUGES
ATMOSPHERE TO 10-4 mbar

The BOC Edwards Active Pirani Gauges (APG) combine the gauge head and controller in one compact active unit. The well proven, cost effective and reliable Pirani range has a substantial user base with a successful track record in the measurement of rough and backing pressures across a broad spectrum of applications.

Features & benefits
• Wide range, regulated, internal power supply
- Runs from standard d.c. power supplies +20 to +36 V
- Tolerant to voltage fluctuations
• Drive electronics combined in the gauge head
- Reduces the system cost
- Saves valuable rack space



• Medium and low pressure versions available
- APG-M and -MP from atmosphere to 10-3 mbar
- APG-L from atmosphere to 10-4 mbar
• Standard analog output 0 to 10 V d.c.
- Easy to interface with a computer or plc
- Fault output indication
• Adjustable set-point
- For process control and interlocking
- Provides vacuum status indication
- Set-point level read visually or with voltmeter
• Low output impedance and integral Faraday shield
- Provides high level of noise immunity
- Permits long cable runs (up to 100 m)
• Corrosion resistant versions available
• Two tube types (AI & St St) & numerous flange types to suit customer
applications
Active ion gauge

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AIGX ACTIVE ION GAUGE
5 x 10-2 Torr to 5 x 10-10 Torr


A compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10-2 to 6.6 x 10-10 mbar Torr (5 x 10-2 to 5 x 10-10) and a 1 Volt/decade linear output.
The new AIGX gauge from BOC Edwards incorporates all the benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gaugehas a degas facility and includes features to protect and extend the life of the filaments. The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Features & benefits
• Full 8-decade measurement capability, to 6.6 x 10-10 mbar (5 x 10-10 Torr)
• Two versions available, each with three vacuum coupling variants:
- ‘D’ versions have a 9-pin ‘D’ connector and standard interface



- ‘S’ versions have enhanced functionality and are fully compatible with the range of BOC Edwards controllers
• Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors
• Automatic filament protection against switching on at atmosphere and running or degassing at high pressure
• Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures
• Continuous pressure measurement output during degas
• Innovative design eliminates the effects of X-ray limits
• Bi-color LED gives local indication of gauge status
• Wide input voltage range
• Electronics very easily removable for bakeout at up to 200 °C
• ‘S’ versions provided with seamless automatic emission current switching, for prolonged filament life
• ‘S’ versions provided with diagnostic outputs indicating ‘emission off’, ‘broken filament’ and ‘overpressure trip’ to help with troubleshooting
• ‘S’ versions provided with a push-button adjustable set point
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