PDF con características
técnicas del producto.
Ver: Página 28 Tamaño: 2.84 MB
XDS5 AND XDS10 SCROLL PUMPS The XDS pumps are an innovative new design which use a patented bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry, but hermetically sealed. The shield also protects the bearing from any process vapors.
Adjustable gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps.
The XDS-C range are designed for pumping condensable vapors and use materials selected for a wide range of laboratory wet chemistry applications.
APPLICATIONS XDS
• Scanning electron microscopes
• Ion implanters (beamline and end stations)
• General clean pumping applications
• Sputtering
• Turbo pump backing
• Rare gas re-circulation
PDF con características
técnicas del producto.
Ver: Página 30 Tamaño: 2.84 MB
XDS35i SCROLL PUMP
The XDS35i pump has the same innovative patented bearing shield design
as the XDS5 and XDS10. This isolates the vacuum environment from all
forms of lubricant, not only making it totally dry but hermetically sealed.
The shield also protects the bearing from any process vapors. Adjustable
gas ballast allows vapor to be handled and opens up the range of applications to many that were previously unsuited to scroll pumps.
An innovation on this pump is the use of an inverter to control the motor
characteristics. This ensures the pump always runs at optimum speed and
allows the user to control the pump remotely.
Features & benefits
• Totally dry, lubricant free vacuum
- No oils or greases of any kind giving cleaner, more repeatable processes with less servicing
- No bearing or shaft seals in vacuum, no bearing purges required
• Peak pumping speed of 35 m3h-1 on 50 or 60 Hz supply
• One model with world-wide voltage compatibility
- 100 to 120 V 50/60 Hz
- 200 to 230 V 50/60 Hz
• Ultimate pressure 0.01 mbar (8 mTorr)
• 3 position gas ballast selector allows handling of >200 g h-1 water vapor
APPLICATIONS
• Mass spectroscopy
• Scanning electron microscopes
• Beam lines and end stations
• Clean pumping applications
• Turbo pump backing
• Rare gas circulation
• Load lock chambers
PDF con características
técnicas del producto.
Ver: Página 31 Tamaño: 2.84 MB
ESDP12 SCROLL PUMP
The ESDP12 is not suitable for applications where vapor pumping is required.
APPLICATIONS
• Clean and dry turbomolecular
pump backing
• High energy physics
• Leak detection
