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The Pyrophoric Conditioning System (PCS) sets a new standard for self oxidation systems using the pyrophoric properties of gases for exhaust control.
The "burn box" or "self-oxidation" concept
The self oxidation concept is a low cost approach for the silane exhausts used in many fabs worldwide. The PCS makes exhaust flows of silane with excess air and uses the natural pyrophoric properties of the gas to ensure
oxidation.
The PCS incorporates design features to alleviate blockage associated with oxidation of high silane flows.
In laboratory tests on simulated process flows, silane oxidation observations show that, at concentrations of silane in nitrogen > 1.6% self oxidation occurs on mixing with air.
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At concentrations below this, oxidation does not occur and the silane, once diluted on mixing with air to <0.05%, is stable and safe.
Features & benefits
Active air input
• Positive fan driven air supply for reaction/dilution air.
• No reliance on duct flows.
Self cleaning inlets
• Fitted with well proven self cleaning inlet system used in the high
performance TPU/TCS product ranges.
• Cyclonic reaction chamber.
• Unique design of the reaction chamber.
• Oxidation occurs within a cyclonic swirl of air.
• Designed to remove 90% of particles >10 micron.
Full monitoring interface
• Essential for a safe installation.
• Positive air flow/system pressure, and outlet temperature, continuously
monitored via PLC control. |
