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TPU THERMAL PROCESSING UNIT
The Thermal Processing Unit (TPU) is an industry standard abatement system for CVD. The proprietary inward-fired combustor, coupled with a high efficiency wet scrubber, has been independently tested to give the highest DRE for PFC gases of any system. Each inlet can be configured for high level abatement of all Global Warming PFC gases, F2 or ClF3. The TPU can accommodate total input flows up to 280 slpm.
It also abates all hydrides and gives below TLV removal of corrosives, while minimizingNOx, Products of Incomplete Combustion (PICs) and Hazardous Air Pollutants (HAPs). The TPU is suitable for all CVD and many etch applications. Additional benefits include low cost of ownership, unrivalled abatement performance, robust field performance, excellent powder handling capabilities and SEMI S2-0703 certification.
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TCS THERMAL CONDITIONING SYSTEM
The Thermal Conditioning System (TCS) provides reliable, high performance, low cost abatement of flammable and acid gases from CVD exhausts. The TCS incorporates the unique inward fired radiant combustor and the high efficiency three stage water scrubber developed for the Thermal Processing range. It is ideally suited for remote plasma NF3 and high flows of F2. |
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HELIOS
Helios is an advanced solution for the abatement
of high hydrogen flows using proven inward-fired combustion. It has been designed to handle both
toxic and carrier gases from low pressure or atmospheric epitaxy and MOCVD applications. Helios safely eliminates the explosive hazards associated with Hydrogen and destroys hydride gases such as AsH3 and PH3 at the point of use. |
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KRONIS
The Kronis is the latest addition to BOC Edwards’ range of inward-fired combustors, designed especially for the effective treatment of process
exhausts from newly emerging low k CVD processes. Achieving clean combustion of low k organosilane precursors is challenging, and failure to do so results in unacceptable by-products and blockages in downstream systems. BOC Edwards has gained an in-depth understanding of low k CVD process issues by working with OEMs and materials suppliers during process development. The Kronis has been designed to overcome the issues associated with this most demanding of CVD processes. |
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HOx HOT OXIDATION SYSTEM
The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Combining an innovative electrical heated oxidation unit with the proven three stage wet scrubber from the inward fire product range, the HOx offers superior performance to competing systems with significant improvement in powder handling capability.
The system is designed to ensure safe removal of pyrophoric gases below flammable limits and effective treatment of acidic by-products to protect exhaust systems from damage. The Hot Oxidation System (HOx) offers point of use treatment of hazardous exhaust gases from semiconductor applications, particularly from the deposition and chamber clean stages of CVD applications. |
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