SMALL PUMPS AND
PUMPING SYSTEMS
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INDUSTRIAL PUMPS AND PUMPING SYSTEMS
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CHEMICAL PUMPS AND PUMPING SYSTEMS
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SEMICONDUCTOR PUMPS
AND EXHAUST MANAGEMENT
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BOC Edwards Tempest range of wet scrubbers offers exhaust management at minimal cost for preservation of assets and regulatory compliance.
They are suitable for treatment of exhaust streams containing water-soluble and water reactive gases.
BOC Edwards wet scrubber range includes the Tempest
The Tempest is a counter-current flow, packed bed absorption/reaction unit.
It is suitable for conductive etch, dielectric etch, LPCVD Nitride and RTP applications, and contains a single stage cold water packed bed absorption unit. The wet scrubber range provides high efficiency gas absorption through a counter current flow tower design. The Integrated ‘sieve tray’ ensures uniform water distribution and removes the possibility of gas channelling.
Coaxial gas inlet
The process gas enters the packed bed enclosure of the Tempest through a coaxial gas inlet(s). This inlet nozzle design permits reactive gases and condensable reaction by-products to enter the scrubber without precipitating or reacting at the scrubber inlet. A nitrogen curtain slows reaction of the incoming process gas with the scrubbing liquid. Inlet servicing is infrequent due to this design, however when required, the removable inlet sleeve can be easily serviced or replaced in less than two minutes. |
Segmented chamber
Segmented chambers are available as an option. They prevent potentially adverse reactions of incompatible gases. Gases remain separated in lower half of packed tower.
TMS
A Temperature Management System (TMS) maintains the inlet duct and inlet at up to 150 °C to prevent the accumulation of condensable by-product.
Mechanical clean
This optional inlet for the Tempest provides periodic removal of any condensed reaction by-products allowing operation for extended periods without intrusive maintenance. Mechanical clean is suitable for Metal Etch, and LPCVD Nitride applications.
Features & benefits
• Robust design, high reliability
• Lower Cost-of-Ownership
• Multiple inlet design
• Effective treatment of incompatible gases through chamber segmentation
• Single-side service access
• PLC control
• Fabworks compatible
• SEMI S2-0303 Certified |
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TEMPEST
Tempest, the new point of use wet scrubber, offers exhaust management at minimal cost for preservation of assets and regulatory compliance. Tempest is suitable for the treatment of semiconductor process tool exhausts containing water-soluble and water-reactive gases such as HCl, Cl2 and NH3. Typical process applications include Metal Etch, Poly Etch, LPCVD Nitride, PECVD Nitride and RTP. Although based on a simple ‘rainstorm in a box’ principle, Tempest includes many innovative design features that deliver real benefits to the customer. These include the prevention of inlet blockages through the use of a co-axial gas inlets and utilities consumption reduction through PLC control.
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