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ZENITH
The Zenith range is a ground breaking series of fully integrated vacuum and exhaust management systems, providing enhanced safety, process tool
compatibility, minimum footprint and reduced cost of ownership. BOC Edwards application expertise is applied to Zenith systems to ensure
the most appropriate hardware and software for the specific application. Use of the latest generation vacuum pump and suitable exhaust management along with any detailed packages that ensure smoother more reliable operation can be fully incorporated.
Features & benefits:
• Safety
- Risk minimization / transfer
- SEMI certification
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- NRTL safety certification available before installation
- Faster onsite installation, commissioning and city permitting
- Easier repeat municipal permitting
• Installation cost savings
- Space saving
- Reduced time, cost and ease of installation
• Operational benefits
- Common control strategy provides wafer security
- Increased wafer throughput and wafer survival as smart interface manages predictive maintenance versus tool utilization
- Reduced cost of ownership
- Fewer components and commonality provide a reduced service requirement
• Process centric
- To match customer and OEM specific applications, each Zenith is designed with the process in mind, enabling the correct choice of vacuum pumps and complete exhaust management to be made. |
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ZENITH PRODUCT RANGE
Zenith Etch
Zenith Etch is a range of fully integrated vacuum and exhaust management solutions for etch processes. The Zenith Etch range incorporates technologies that best suit your requirements.
Zenith Etch Plasma
Comprises atmospheric plasma, integral wet scrubber and specially process hardened pumps. Zenith Etch Plasma is a fuel-less exhaust management solution with a low cost of ownership (versus other technologies), very low energy consumption and minimal consumables. |
Zenith Etch TPU-M
Comprises the latest generation dry pumps with exhaust management from the established thermal processor range. The TPU-M abatement system comprises a small inward-fired combustor with a compact 2-stage wet scrubber. It has a lower utility cost than the standard TPU, while still providing excellent abatement performance. |
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Zenith CVD
Zenith CVD incorporates the latest generation dry pumps, exhaust management
best suited to your specific requirements and integrated pipeline heating (TMS). It is the proven highest performance system for CVD handling both high flows of deposition and chamber clean gases. |
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