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STP MAGNETICALLY LEVITATED
TURBOMOLECULAR PUMPS
BOC Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 70000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
• Proven reliability.
• Clean oil-free high vacuum.
• Complete range from 300 to
3500 l s-1.
• Application specific models.
• Very low noise and vibration.
• Low cost of ownership.
• Virtually maintenance free.
• Installation in any orientation.
• Full remote control interface.
• Supported globally by BOC Edwards |
APPLICATIONS
Semiconductor fabrication STP turbomolecular pumps are the number one choice for the world's leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability.
• Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
• Electron cyclotron resonance (ECR) etch
• Film deposition CVD, PECVD, ECRCVD, MOCVD
• Sputtering
• Ion implantation source, beam line pumping end station
• MBE
• Diffusion
• Photo resist stripping
• Crystal/epitaxial growth
• Wafer inspection
• Load lock chambers
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STP301/STP301C TURBOMOLECULAR PUMP
BOC Edwards STP301 and corrosion resistant STP-301C are for use in electron microscopes and semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
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Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STP301CB TURBOMOLECULAR PUMP
BOC Edwards corrosion resistant STP301CB turbomolecular pump offers field proven reliability for use in the harshest of semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility.
The STP301CB has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• Low field
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life
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Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STP451/STP451C TURBOMOLECULAR PUMP
BOC Edwards STP-451 and corrosion resistant STP-451C are for use in electron microscopes, scientific instruments and semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP451 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
|
Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STP451CB TURBOMOLECULAR PUMP
BOC Edwards corrosion resistant STP451CB turbomolecular pumps offers field proven reliability for use in the harshest of semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility.
The STP451CB has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• Low field
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life
|
Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STP-L301/STP-L301C TURBOMOLECULAR PUMP
BOC Edwards STP-L301(C) and corrosion resistant STP-L301(C) are for use in electron microscopes and semiconductor applications. BOC Edwards rotor technology gives class leading performance for maximum process flexibility. The STP-L301(C) has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
|
Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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