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STP-L451/STP-L451C
TURBOMOLECULAR PUMP
The new BOC Edwards STP-L451(C) has been designed to meet the low vibration requirements of advanced spectroscopy and microscopy tools. It is based on BOC Edwards class leading STP451(C) model but provides the advantage of having the vibration isolation system built into the pump body. This revolutionary design provides an array of benefits to user. |
Features & benefits
Low vibration
• Built in vibration isolation system gives improved performance over
STP451(C) and external isolator
Increased pumping performance
• No external isolator so conductance losses are |
reduced giving true 450 l/s performance
More compact design
• Considerably smaller than STP451(C) and external isolator
Easy installation
• One single pump component reduces installation time |
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STP603/STP603C
TURBOMOLECULAR PUMP
BOC Edwards STP603 and corrosion resistant STP603C are new turbomolecular pumps for use in the most advanced semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility. Both pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
(C version)
• Increased life
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Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STP1003/STP1003C
TURBOMOLECULAR PUMP
BOC Edwards STP1003 and corrosion resistant STP1003C are new turbomolecular pumps for use in the most advanced of semiconductor applications. BOC Edwards rotor technology gives class-leading performance for maximum process flexibility.
Both pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
(C version)
• Increased life
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Advanced controller design
• Auto tuning
• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller |
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STPH301C HIGH PERFORMANCE TURBOMOLECULAR PUMP
BOC Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications.
The pump's field proven reliability and class leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. |
Features & benefits
Advanced rotor technology
• Higher gas throughput
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life
Advanced controller design
• Auto tuning
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• Self diagnostic functions
• d.c. motor drive
• Battery-free operation
Compact design
• Small footprint
• Half rack controller
5 axis magnetic suspension system
• Zero contamination
• Low maintenance
• Any orientation operation |
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