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TEMPERATURE MANAGEMENT SYSTEM (TMS)
Temperature control units (chillers)

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TCU 40/80 CHILLER

The TCU 40/80 Temperature Control Unit (chiller) is a single channel temperature control unit which supplies perfluorocarbon coolant in a closed loop for temperature control of semiconductor process chambers and wafers during etch and other processes. The TCU 40/80 is designed for reliability, up-time performance and ease of maintenance, providing continuous and trouble free cooling across a wide temperature range. Use the TCU for cooling electrostatic chucks, quartz windows, and chamber domes and walls.
Features & benefits
• Magnetically driven, leak-free coolant pump with perfluorocarbon coolant
• Wide control temperature range, from -40 to 80 °C
• Temperature control in 0.1 °C increments, with typical stability ±0.5 °C.
• Adjustable coolant flow, from 3.8 to 22.7 l min-1 (1 6 gal min-1)
• Stainless steel pressurized coolant system
• Fast temperature ramp up and down
• MTBF of 50000 hours
• Minimized pipe lengths and number of joints and all brazed refrigeration system
• Refrigerant and coolant lines are helium leak checked

PDF con características
técnicas del producto.

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Tamaño: 9.49 MB
TCU 40/80 PLUS CHILLER

High reliability and up-time performance
The TCU 40/80 Plus is designed to meet the stringent semiconductor
requirements for the cooling of wafers during etch or other semiconductor
processes. The TCU 40/80 Plus is designed for reliability, up-time performance
and ease of maintenance, providing continuous trouble-free
operation across wide temperature extremes. This, combined with BOC
Edwards worldwide service hubs and on-site service support, makes the
TCU 40/80 Plus the new industry standard.

Features & benefits
• Magnetically driven coolant pump for leak free, reliable operation
• Wide operating temperature -40 to +80 °C
• Temperature set at 0.1 °C increments
• Typical stability +/- 1 °C
• Adjustable coolant flow rate 1-6 gpm
• SEMI S2-93 qualified

• CE marked; low voltage directive compliant
• Perfluorocarbon coolant for ion free operation
• Remote temperature sensing capability
• Stainless steel pressurized coolant system
• MTBF of 50000+ hours
• Refrigerant & coolant lines are helium leak checked
• BOC Edwards worldwide service


APPLICATIONS
The TCU 40/80 Plus Temperature Control Unit is a single channel
temperature control unit which supplies perfluorocarbon coolant in a
closed loop for temperature control of semiconductor process chambers
and wafers during etch and other processes. The TCU 40/80 Plus is
designed for reliability, up-time performance and ease of maintenance,
providing continuous and trouble-free cooling across a wide temperature
range. Use the TCU Plus for cooling electrostatic chucks, quartz windows,
chamber domes and walls.

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