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These are a new range of dry pumps for the semiconductor industry.
The iH pumps provide high reliability coupled with low cost of ownership for difficult processes such as etch, PECVD and LPCVD used for silicon wafer and flat panel display manufacturing.
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Features & benefits
• Robust, heavy duty pump mechanism optimized for particulate and by-product
• High operating temperature prevents condensation
• Compact, efficient design with small footprint and high pumping speed
• Low cost of ownership
• Comply with CE, SEMI S2 and UL |
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iH1800 and iH160
The iH1800 and iH160 have been added to the range of iH Dry Pumps to meet the high flow rate pumping requirements of 300 mm Semiconductor and Flat Panel Display processes, offering peak pumping speeds of 1800 m3h-1 and 160 m3h-1 respectively. As with other iH pumps in the product range, these new additions offer proven high reliability and low cost of ownership for difficult processes such as etch, PECVD and LPCVD where particulate, condensable and corrosive by-products are present. |
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iF1800 DRY PUMP
The iF1800 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools.
Building on the proven quality and reliability of BOC Edwards products, the iF1800 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput. |
Features & benefits
• Rapid loadlock pump down – saves vital seconds
• High reliability on high frequency cycling applications
• Interfaces available for all process tools |
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iL DRY PUMPS
The iL is specifically designed for clean processes to give very low cost of ownership and exceptional reliability, requiring zero periodic maintenance between rebuilds. With their quiet operation, small footprint and high pump speeds, they are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iLN variants include shaft seal nitrogen purging and are designed for light duty applications such as dielectric etch. |
Features & benefits
• Low cost of ownership, with no nitrogen (iL), low power and low
consumption of cooling water
• Compact, efficient design, with small footprint and high pumping speeds
• High reliability, resulting in low service costs
• Comply with CE, SEMI S2, and UL |
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L70 DRY PUMP
The L70 is a simple low cost dry pump specifically designed for clean loadlocks
and similar applications. |
Features & benefits
• Low cost of ownership, with no nitrogen, low power and low
consumption of cooling water
• Simple control |
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