SMALL PUMPS AND
PUMPING SYSTEMS
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INDUSTRIAL PUMPS AND PUMPING SYSTEMS
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CHEMICAL PUMPS AND PUMPING SYSTEMS
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SEMICONDUCTOR PUMPS
AND EXHAUST MANAGEMENT
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The above shows the Zenith integrated pump and abatement system featuring two iH pumps.
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PDF con características
técnicas del producto.
Ver: Página 51
Tamaño: 9.49 MB |
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iH AND iL PUMPS: APPLICATIONS INFORMATION
The new range of BOC Edwards iH dry pumps are specifically designed for the harshest of semiconductor processes. For these applications, pumps like the iH that operate at high temperature are an advantage. In addition, the iH pumps have specially enhanced particulate handling capability. iH pumps are designed for long service life and highly efficient use of utilities like cooling water, nitrogen and power. With very small footprint and pumping speeds enhanced for the latest processes, they form the optimum choice for low cost of ownership in demanding service. |
processes, they form the optimum choice for low cost of ownership in demanding service.
Complementary to the iH range of pumps is the new iL range of pumps specifically engineered for lowest cost of ownership on clean, light duties. The iL pumps share many of the design features of the iH range (specifically long service life) coupled with a design which optimizes clean performance with minimized utility consumption. A novel seal and shaft design allows operation without nitrogen for these duties. Refer to the information in this table to select either the iH or the iL pumps for your application. The table also shows recommendations for the exhaust management options to use. |
iH80 AND iH600 DRY PUMPS
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iH1000 DRY PUMP
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L70 DRY PUMP
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iL70, iL70N, iL600, iL600N
DRY PUMPS
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iH1800, iH1800HTX AND iH160 DRY PUMP
The iH1800 has been designed specifically for high throughput applications in the 300 mm and flat panel display markets. This pump combines quality and reliability based on 20 years dry pumping experience.
The iH1800 provides low power consumption minimizing environmental impact and running costs.
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Features & benefits
• Low power consumption
• Small footprint
• Proven reliability from years of experience
• Conforms to international standards
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iF1800 DRY PUMP
The iF1800 is the optimal solution for the demanding load lock pump down
requirements of flat panel display process tools.
Building on the proven quality and reliability of BOC Edwards products,
the iF1800 delivers improved pumping performance, the capability to
achieve shorter load lock cycle times and increased tool throughput.
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Features & benefits
• Rapid loadlock pump down saves vital seconds
• High reliability on high frequency cycling applications
• Interfaces available for all process tools |
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