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The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
EPX APPLICATIONS SUMMARY
The EPX series covers a broad range of applications from wafer handling through to medium duty processes. The EPX ‘L’ Series has been designed for use in clean applications in which a non-corrosive and non-particulate forming environment is used. The EPX ‘N’ Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected.
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Features & benefits
• Compact footprint - as one of the smallest on-tool pumps available, the EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely
if preferred.
• Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.
• Unique patent protected pumping mechanism - the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
• Ultra clean mechanism - conventional high vacuum bearings under grease use grease lubrication which can be a source of contamination in process tools. EPX pumps have no high vacuum bearings under grease and present no other source of potential contamination.
• Extremely reliable - based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
• Network compatible - available with End User Control the EPX series can be connected to a fab-wide network for diagnostic monitoring and control. |
