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The IPX series of drypumps were specifically designed to meet the
demanding requirements placed on advanced semiconductor process tool vacuum systems. In times when space is at a premium, the IPX range of drypumps replaces conventional multiple pump systems with a single pump that can be mounted on the tool to minimize footprint.
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Features & benefits
• Unique pumping mechanism - the IPX can pump down from atmosphere to TMP base pressure and can operate continuously at all inlet pressures.
• Clean bearing system - conventional high vacuum bearings use grease lubrication which can be a source of contamination in process tools. IPX pumps have no high vacuum bearings and present no other source of contamination.
• Extremely reliable - field proven reliability with MTBFp = 13 years (SEMI E10) with service periods of around 5 years.
• Flexible mounting options - the IPX range can be integrated into the tool which saves space or they can be installed remotely wherever is most convenient.
• Network compatible - all IPX pumps can be ordered with Cnet which enables them to be connected to a Fab-Wide network. |
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IPX100 DRY PUMP
IPX100 is an innovative concept in next generation pumping. As the first point of use pump to be integrated onto process tool platforms, it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping load locks on the advanced 300 mm process tools offering rapid pump down from atmosphere to less than 4 x 10-3 Torr. |
Features & benefits
Innovative pumping mechanism
• Robust design
• Extremely clean vacuum
• No high vacuum bearings
• Low noise and vibration
Compact construction
• Cleanroom compatible
• Lightweight
• Small footprint
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Low cost of ownership
• Sub-fab space saving
• No vacuum foreline
• No nitrogen
• Low power and cooling water
High reliability
• MTBFp = 13 years (SEMI E10)
• Zero periodic maintenance
• Low service costs
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IPX100A DRY PUMP
IPX100A is an innovative concept in next generation pumping. Integrated onto process tool platforms, it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping load locks on the advanced 300 mm process tools offering rapid pump down from atmosphere to less than 4 x 10-3 Torr. IPX100A differs from IPX100 in the orientation of the electrical boxes. |
Features & benefits
Innovative pumping mechanism
• Robust design
• Extremely clean vacuum
• No high vacuum bearings
• Low noise and vibration
Compact construction
• Cleanroom compatible
• Lightweight
• Small footprint
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Low cost of ownership
• Sub-fab space saving
• No vacuum foreline
• No nitrogen
• Low power and cooling water
High reliability
• MTBFp = 13 years (SEMI E10)
• Zero periodic maintenance
• Low service costs
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IPX180A DRY PUMP
IPX180A is a new vacuum pump designed for use on low pressure load lock and transfer chamber applications. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pressures of less than 7.5 x 10-5 Torr. The pump can operate continuously at any inlet pressure and exhausts to atmospheric pressure. Cleanroom compatibility means the pump can be located close to the process tool. |
Features & benefits
Innovative pumping mechanism
• Robust design
• Extremely clean vacuum
• No high vacuum bearings
• Low noise and vibration
Compact construction
• Cleanroom compatible
• Lightweight
• Small footprint
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Low cost of ownership
• Sub-fab space saving
• No vacuum foreline
• No nitrogen
• Low power and cooling water
High reliability
• MTBFp = 13 years (SEMI E10)
• Zero periodic maintenance
• Low service costs
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IPX500A DRY PUMP
IPX500A is a new vacuum pump designed for use on low pressure load ltock, transfer and light process chamber applications. IPX500A provides he same performance as a small turbomolecular and backing pump combination in a single package. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pressures of less than 7 x 10-7 Torr. The pump can operate continuously at anyinlet pressure and exhausts to atmospheric pressure. Cleanroom compatibility means the pump can be located close to the process tool. |
Features & benefits
Innovative pumping mechanism
• Robust design
• Extremely clean vacuum
• No high vacuum bearings
• Low noise and vibration
Compact construction
• Cleanroom compatible
• Lightweight
• Small footprint
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Low cost of ownership
• Eliminates secondary pumps
• Sub-fab space saving
• No vacuum foreline
• No nitrogen
• Low power and cooling water
High reliability
• MTBFp = 13 years (SEMI E10)
• Zero periodic maintenance
• Low service costs |
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